Nanotechnology cleanroom


We operate a £6m state-of-the-art class 100 Cleanroom offering photo-electron and focused ion-beam lithography and has an extensive microwave and high-frequency electronics infrastructure which supports a number of programmes in the school and across the university.

Concerned with the manipulation and arrangement of components on the nanometrenanometer scale, the transformative possibilities of in this field are immense for the physical, biological and medical sciences and their allied industrial and clinical applications. As such, Nanotechnology is identified by research funding bodies around the globe as a priority area.

Our semiconductor nanotechnology cleanroom was has undergone several major investments during the past decade. Our latest £4.5m electron beam lithography system allows us to fabricate structures to a resolution below 10nm. It offers a highly reproducible stitching and overlay accuracy of under 20nm, and an ability to pattern a complete six-inch wafer. We also provide offer optical and ion beam lithography.

With a dedicated technician and experimental office to support us, we participates in cross-disciplinary research projects within the University of Leeds and beyond. We are involved in projects looking at nano-spintronic devices, nanomagnetism, magnetic nanowires, high-frequency nanoelectronics, single- molecule electronics and hybrid bio-electronic materials.

We are committed to sharing our facilities and associated expertise with external academic and industrial collaborators. To make an enquiry please email Professor Edmund Linfield or Professor John Cunningham